关键字导读: TRACK ETCH PVD PECVD MOCVD MEMS CMP COATING CLEAN DETECT
MIAOSHU:GAOJIEJINGDENGJI,GAOJINGDU,GAOSUCHUANPIAN,NAIFUSHI,PENGZHUANGBAOHU,MappingGONGNENG,SEMIRENZHENG,TIGONGJIEKOUJIMODUANDINGZHI。
简介
Introduction
新萄京DAQIJIXIESHOUGUANGFANYONGYUGUIJINGYUANYIJILEDLANBAOSHIJIPIANBANYUN。SHOUBEICAIYONGXIANJINDEJIEGOUJIAQIANGLESHOUBEIDEGANGXING,BINGYOUXIAOYIZHIZHENDONG,QINGLIANGHUASHEJIMANZUGAOSUYAOQIU。BENTIDEZHIZAOGONGYIGAIJINYOUXIAOJIANGDICHENGBEN,TISHENGSHICHANGJINGZHENGLI。CAILIAO、JIAGONGYIJIBIAOMIANCHULIDUOFANGMIANYOUXUAN,YISHIXIANGAOJIEJINGDU。JUYOUDUOZHONGANQUANBAOHUGONGNENG。ZHOUBUHEWANBULINGHUOKONGZHI,SHIDEJIQIRENKEYICAIYONGRENYIZISHILAIQUFANGJINGYUAN,YUNXUGENGDUODEPIANHEZHIXIANPAIBU,GENGJIESHENGKONGJIAN,SHIYINGXINGGENGQIANG。SHIBANDAOTIXINGYEDEYOUSHIZHIXUAN。
参数
Parameter
结构形式Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
---|---|---|
负载Payload | 名称name | 晶圆wafer |
直径diameter | Φ200mm/Φ300mm | |
重量weight | ≤0.5kg | |
自由度数DOF | 3 | |
最大回转直径Maximum Swing diameter | 520mm | |
YUNDONGFANWEI Moving Range | 升降轴 (Z轴)Up/Down( Z)-Axis | 330mm |
回转轴 (T轴) Rotational(T)-Axis | 330° | |
伸展轴 (R轴) Extension(Z)-Axis | R736mm | |
ZUIDASUDU Maximum Moving Speed | 升降轴 (Z轴)Up/Down( Z)-Axis | 330mm/s |
回转轴 (T轴) Rotational(T)-Axis | 360° | |
伸展轴 (R轴) Extension(Z)-Axis | 900mm/s | |
ZHONGFUDINGWEIJINGDU Repeatability | 升降轴 (Z轴)Up/Down( Z)-Axis | ±0.1 mm(3σ) |
回转轴 (T轴) Rotational(T)-Axis | ±0.01°(3σ) | |
伸展轴 (R轴) Extension(Z)-Axis | ±0.1 mm(3σ) |
友情链接:
版权所有:新萄京