新萄京

新萄京> 产品中心 > 洁净机器人 > 大气机械手SRBJ1A-AS3491
大气机械手SRBJ1A-AS3491

关键字导读： TRACK ETCH PVD PECVD MOCVD MEMS CMP COATING CLEAN DETECT

MIAOSHU：GAOJIEJINGDENGJI，GAOJINGDU，GAOSUCHUANPIAN，NAIFUSHI，PENGZHUANGBAOHU，MappingGONGNENG，SEMIRENZHENG，TIGONGJIEKOUJIMODUANDINGZHI。

简介

Introduction

新萄京DAQIJIXIESHOUGUANGFANYONGYUGUIJINGYUANYIJILEDLANBAOSHIJIPIANBANYUN。SHOUBEICAIYONGXIANJINDEJIEGOUJIAQIANGLESHOUBEIDEGANGXING，BINGYOUXIAOYIZHIZHENDONG，QINGLIANGHUASHEJIMANZUGAOSUYAOQIU。BENTIDEZHIZAOGONGYIGAIJINYOUXIAOJIANGDICHENGBEN，TISHENGSHICHANGJINGZHENGLI。CAILIAO、JIAGONGYIJIBIAOMIANCHULIDUOFANGMIANYOUXUAN，YISHIXIANGAOJIEJINGDU。JUYOUDUOZHONGANQUANBAOHUGONGNENG。ZHOUBUHEWANBULINGHUOKONGZHI，SHIDEJIQIRENKEYICAIYONGRENYIZISHILAIQUFANGJINGYUAN，YUNXUGENGDUODEPIANHEZHIXIANPAIBU，GENGJIESHENGKONGJIAN，SHIYINGXINGGENGQIANG。SHIBANDAOTIXINGYEDEYOUSHIZHIXUAN。


更多详情，请单击新松洁净产品资料库

参数

Parameter


结构形式Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
负载Payload名称name晶圆wafer
直径diameterΦ200mm/Φ300mm
重量weight≤0.5kg
自由度数DOF3
最大回转直径Maximum Swing diameter520mm

YUNDONGFANWEI

Moving  Range		升降轴 (Z轴)Up/Down( Z)-Axis330mm
回转轴 (T轴) Rotational(T)-Axis330°
伸展轴 (R轴) Extension(Z)-AxisR736mm

ZUIDASUDU

Maximum  Moving Speed		升降轴 (Z轴)Up/Down( Z)-Axis330mm/s
回转轴 (T轴) Rotational(T)-Axis360°
伸展轴 (R轴) Extension(Z)-Axis900mm/s

ZHONGFUDINGWEIJINGDU

Repeatability		升降轴 (Z轴)Up/Down( Z)-Axis±0.1 mm(3σ)
回转轴 (T轴) Rotational(T)-Axis±0.01°(3σ)
伸展轴 (R轴) Extension(Z)-Axis±0.1 mm(3σ)



新萄京