新萄京

PINUS1-B

关键字导读: PECVD PVD ETCH MEMS

MIAOSHU:ZHIQUDIANJIJIEGOU,QUANXINDEIOMOKUAI,JUYOUXIANJINDEFANGPENGZHUANGBAOHUGONGNENGJISHURUXINHAOZHIYINGJIANZHONGDUANGONGNENG,YONGYOUSEMIRENZHENG。MANZUGEXINGHUASHEJIZHICHIYONGHUDINGZHI,SHOUBEIZHANGDUKEXUAN,KEWEIKEHUTIGONGJIEKOUJIMODUANDINGZHIFUWU。

简介

Introduction

新萄京ZHIQUDIANJIJIEGOUJUYOUGENGGAODEZHENKONGTEXING,NEIBUJIEGOUMEIYOUCHILUN,PIDAIDENGBUJIAN,XITONGYUNXINGDEPINGWENXINGGENGHAO,KEKAOXINGGENGGAO。QUANXINDEIOMOKUAI,JUYOUGENGDUODESHUCHUSHURUYINJIAO,YONGHUKEYIGENJUXUQIUPEIZHICHENGHUSUO,CHUANGANQIJIANCEDENGGONGNENG。SHURUXINHAOZHIYINGJIANZHONGDUANGONGNENG,FANGBIANKEHUPEIZHIAWCDENGWEIZHISUOCUNGONGNENGYINGYONG。DAIYOUANQUANQUPEIZHIGONGNENGHELINGMINDEPENGZHUANGBAOHUGONGNENG,JIANSHAOYONGHUWUCAOZUODAOZHIDEGEZHONGSUNSHI。DAIYOUDAPINGMUJIQIRENSHIJIAOQI,FANGBIANDIAOSHIRENYUANSHIYONG,BINGZHICHIRECHABAGONGNENG。KEYIGENJUKEHUYINGYONGDETESHUYAOQIU,DINGZHISHOUBEICHICUN,ZZHOUXINGCHENG,NAIGAOWENNAIFUSHITEXINGDENG。


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参数

Parameter


本体重量Body Weight50KG
适用晶圆尺寸Wafer Size300mm/200mm/150mm/125mm/100mm
负载Payload1KG
电源输入Power SupplyAC电压:100-240V    AC频率:50HZ/60HZ
节拍Bear4s-8.1s(Pick,Rotate180°,Place,根据手指材料,传输位置不同相关)
动态偏差纠正精度(AWC)±0.1mm
重复定位精度RepeatabilityZ: ±0.05mm(3σ)
T: ±0.003°(3σ)
R: ±0.05mm(3σ)
漏率Leak rate<  1 x 10E-9 std. cc/sec He
真空度Base Pressure5X10-9Torr

SHIYONGWENDU Applicable  temperature

法兰:<120℃;本体:<50℃;手臂:<120℃

JIEJINGDUClean Class

ISO  CLASS1

MCBF

>1100million cycles

FUHEYUNDONG Compound  motion

支持Support
PC远程操作软件支持Support
通信接口Communications

Ethernet/CHUANKOUserial interface

IO互锁IO interlock

ZHICHISupport

安全区Safe area

ZHICHISupport

新萄京PENGZHUANGBAOHUCollision  protection

ZHICHISupport



新萄京