关键字导读: PECVD PVD ETCH MEMS
MIAOSHU:ZHIQUDIANJIJIEGOU,QUANXINDEIOMOKUAI,JUYOUXIANJINDEFANGPENGZHUANGBAOHUGONGNENGJISHURUXINHAOZHIYINGJIANZHONGDUANGONGNENG,YONGYOUSEMIRENZHENG。MANZUGEXINGHUASHEJIZHICHIYONGHUDINGZHI,SHOUBEIZHANGDUKEXUAN,KEWEIKEHUTIGONGJIEKOUJIMODUANDINGZHIFUWU。
Introduction
新萄京ZHIQUDIANJIJIEGOUJUYOUGENGGAODEZHENKONGTEXING,NEIBUJIEGOUMEIYOUCHILUN,PIDAIDENGBUJIAN,XITONGYUNXINGDEPINGWENXINGGENGHAO,KEKAOXINGGENGGAO。QUANXINDEIOMOKUAI,JUYOUGENGDUODESHUCHUSHURUYINJIAO,YONGHUKEYIGENJUXUQIUPEIZHICHENGHUSUO,CHUANGANQIJIANCEDENGGONGNENG。SHURUXINHAOZHIYINGJIANZHONGDUANGONGNENG,FANGBIANKEHUPEIZHIAWCDENGWEIZHISUOCUNGONGNENGYINGYONG。DAIYOUANQUANQUPEIZHIGONGNENGHELINGMINDEPENGZHUANGBAOHUGONGNENG,JIANSHAOYONGHUWUCAOZUODAOZHIDEGEZHONGSUNSHI。DAIYOUDAPINGMUJIQIRENSHIJIAOQI,FANGBIANDIAOSHIRENYUANSHIYONG,BINGZHICHIRECHABAGONGNENG。KEYIGENJUKEHUYINGYONGDETESHUYAOQIU,DINGZHISHOUBEICHICUN,ZZHOUXINGCHENG,NAIGAOWENNAIFUSHITEXINGDENG。
Parameter
本体重量Body Weight | 50KG |
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适用晶圆尺寸Wafer Size | 300mm/200mm/150mm/125mm/100mm |
负载Payload | 1KG |
电源输入Power Supply | AC电压:100-240V AC频率:50HZ/60HZ |
节拍Bear | 4s-8.1s(Pick,Rotate180°,Place,根据手指材料,传输位置不同相关) |
动态偏差纠正精度(AWC) | ±0.1mm |
重复定位精度Repeatability | Z: ±0.05mm(3σ) |
T: ±0.003°(3σ) | |
R: ±0.05mm(3σ) | |
漏率Leak rate | < 1 x 10E-9 std. cc/sec He |
真空度Base Pressure | 5X10-9Torr |
SHIYONGWENDU Applicable temperature | 法兰:<120℃;本体:<50℃;手臂:<120℃ |
新萄京JIEJINGDUClean Class | ISO CLASS1 |
MCBF | >1100million cycles |
FUHEYUNDONG Compound motion | 支持Support |
PC远程操作软件 | 支持Support |
通信接口Communications | 新萄京Ethernet/CHUANKOUserial interface |
IO互锁IO interlock | ZHICHISupport |
安全区Safe area | ZHICHISupport |
PENGZHUANGBAOHUCollision protection | ZHICHISupport |