关键字导读： PECVD PVD ETCH MEMS
MIAOSHU：ZHIQUDIANJIJIEGOU，QUANXINDEIOMOKUAI，JUYOUXIANJINDEFANGPENGZHUANGBAOHUGONGNENGJISHURUXINHAOZHIYINGJIANZHONGDUANGONGNENG，YONGYOUSEMIRENZHENG。MANZUGEXINGHUASHEJIZHICHIYONGHUDINGZHI，SHOUBEIZHANGDUKEXUAN，KEWEIKEHUTIGONGJIEKOUJIMODUANDINGZHIFUWU。
Introduction
新萄京ZHIQUDIANJIJIEGOUJUYOUGENGGAODEZHENKONGTEXING，NEIBUJIEGOUMEIYOUCHILUN，PIDAIDENGBUJIAN，XITONGYUNXINGDEPINGWENXINGGENGHAO，KEKAOXINGGENGGAO。QUANXINDEIOMOKUAI，JUYOUGENGDUODESHUCHUSHURUYINJIAO，YONGHUKEYIGENJUXUQIUPEIZHICHENGHUSUO，CHUANGANQIJIANCEDENGGONGNENG。SHURUXINHAOZHIYINGJIANZHONGDUANGONGNENG，FANGBIANKEHUPEIZHIAWCDENGWEIZHISUOCUNGONGNENGYINGYONG。DAIYOUANQUANQUPEIZHIGONGNENGHELINGMINDEPENGZHUANGBAOHUGONGNENG，JIANSHAOYONGHUWUCAOZUODAOZHIDEGEZHONGSUNSHI。DAIYOUDAPINGMUJIQIRENSHIJIAOQI，FANGBIANDIAOSHIRENYUANSHIYONG，BINGZHICHIRECHABAGONGNENG。KEYIGENJUKEHUYINGYONGDETESHUYAOQIU，DINGZHISHOUBEICHICUN，ZZHOUXINGCHENG，NAIGAOWENNAIFUSHITEXINGDENG。
Parameter
| 本体重量Body Weight | 50KG |
|---|---|
| 适用晶圆尺寸Wafer Size | 300mm/200mm/150mm/125mm/100mm |
| 负载Payload | 1KG |
| 电源输入Power Supply | AC电压:100-240V AC频率：50HZ/60HZ |
| 节拍Bear | 4s-8.1s(Pick,Rotate180°,Place,根据手指材料，传输位置不同相关) |
| 动态偏差纠正精度(AWC) | ±0.1mm |
| 重复定位精度Repeatability | Z: ±0.05mm（3σ） |
| T: ±0.003°（3σ） | |
| R: ±0.05mm（3σ） | |
| 漏率Leak rate | < 1 x 10E-9 std. cc/sec He |
| 真空度Base Pressure | 5X10-9Torr |
SHIYONGWENDU Applicable temperature | 法兰:<120℃;本体:<50℃;手臂:<120℃ |
新萄京JIEJINGDUClean Class | ISO CLASS1 |
MCBF | >1100million cycles |
FUHEYUNDONG Compound motion | 支持Support |
| PC远程操作软件 | 支持Support |
| 通信接口Communications | 新萄京Ethernet/CHUANKOUserial interface |
| IO互锁IO interlock | ZHICHISupport |
| 安全区Safe area | ZHICHISupport |
PENGZHUANGBAOHUCollision protection | ZHICHISupport |
