关键字导读: ETCH PVD PECVD MOCVD MEMS
MIAOSHU:CAIYONGCILIUTIMIFENGJISHU,WANGLUOHUAKONGZHIXITONG,JUYOUXIANJINDEFANGPENGZHUANGBAOHUGONGNENGJIDONGTAIJIUPIANGONGNENG,YONGYOUSEMIRENZHENG,MCBFDAYU1000WANCI,TONGSHIJUBEICHAOGAOJIEJINGDU,NAIGAOWEN、NAIFUSHI,FUZAINENGLIQIANGDENGTEDIAN。MANZUGEXINGHUASHEJIZHICHIYONGHUDINGZHI,FUZAI、SHOUBEIZHANGDUKEXUAN,KEWEIKEHUTIGONGJIEKOUJIMODUANDINGZHIFUWU。SHIDAFUZAIZHENKONGJIXIESHOUDEYOUYUEZHIXUAN。
Introduction
新萄京DAFUZAIZHENKONGJIXIESHOU, LEDXINPIANZHIZAOLINGYUDEZHENKONGJIXIESHOUCHANPIN,ZHUYAOYONGYULEDXINPIANZHIZAOGUOCHENGZHONG,SHIXIANZHUANGYOUDALIANGLEDJINGYUANDETUOPANZAIGEGEGONGYIQIANGSHIJIANDECHUANSONG,JUYOUZHENKONGDUGAO,FUZAIDA,CHUANSHUXIAOLVGAO,NAIGAOWENDENGTEDIAN,DADATIGAOLELEDXINPIANSHENGCHANZHIZAODELIANGLVHEXIAOLV,SHILEDXINPIANZHIZAOZHUANGBEIDEGUANJIANCHANPIN。CHUANTONGDELEDXINPIANZHIZAOCAIYONGJICHENGDIANLUZHIZAOZHICHENGYINGYONGDEZHENKONGJIXIESHOU,QIFUZAINENGLIZHIYOU1kg。BENCHANPINZAIJICHENGDIANLUZHIZAOYONGZHENKONGJIXIESHOUDEJICHUSHANG,ZHENDUIQIDAFUZAIXUQIU,CHUANGXINLEQICHUANSHUJIEGOUHEKONGZHIGUILV,SHIQINENGGOUDADAO20.5kgDEFUZAINENGLI,TONGSHIBAOCHIHENXIAODEZHANYONGTIJI,BAOCHIGAONAIZHENKONGDUJIJIEJINGDENGJI。
Parameter
结构形式Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
---|---|---|
驱动方式Driving method | 伺服电机Servo Motor | |
手数量Number of Arm | 单臂Single Arm | |
负载Payload | 名称name | 托盘Tray |
直径diameter | Φ710mm | |
重量weight | ≤10.5kg | |
自由度数DOF | 3 | |
手臂长度Arm Length | 355mm | |
SHOUZHIZHANGDU(ANZHUANGZHONGXINZHIGUIPIANZHONGXIN) Finger length(distance from install center to wafer center) | 765mm | |
YUNDONGFANWEI Moving Range | Z轴Z-axis | 150mm |
R轴,机械手旋转中心至工艺腔中心 R-axis, robot center to process chamber center | 极限(Ultimate)1440mm | |
θ轴θ-axis | 无限回转Infinite Rotation | |
QUANXINGCHENGZUIXIAOSHIJIAN Minimum running time | Z轴Z-axis | 1s/35mm |
R轴R-axis | 5s/伸出或缩回Extend or Retraction | |
θ轴θ-axis | 5s/180° | |
ZHONGFUDINGWEIJINGDU Repeatability | θ轴(°)θ-Axis | ±0.01(3σ) |
R轴(mm)R-Axis | ±0.1(3σ) | |
JIXIESHOUDAIφ710mmFUZAIHOUZUIXIAOHUIZHUANZHIJING Robot minimum turning diameter with Φ 710 mm load | 1530mm | |
SHENCHU1440mmFUZAIZHIJING710mmZUIQIANDUANXIACHUILIANG The front sag of robot which out of 1440mm with Φ 710 mm load | 5.5mm | |
重复定位精度Repeatability | ±0.2mm | |
耐真空度Base Pressure (Pa) | 10-6Pa | |
重量Weight | 机械手本体Main-body | 100kg |
控制器Controller | 15kg | |
碰撞保护Collision Protect Function | 盘片和机械手无损伤/工位需重新校准 |