关键字导读： ETCH PVD PECVD MOCVD MEMS
MIAOSHU：CAIYONGCILIUTIMIFENGJISHU，WANGLUOHUAKONGZHIXITONG，JUYOUXIANJINDEFANGPENGZHUANGBAOHUGONGNENGJIDONGTAIJIUPIANGONGNENG，YONGYOUSEMIRENZHENG，MCBFDAYU1000WANCI，TONGSHIJUBEICHAOGAOJIEJINGDU，NAIGAOWEN、NAIFUSHI，FUZAINENGLIQIANGDENGTEDIAN。MANZUGEXINGHUASHEJIZHICHIYONGHUDINGZHI，FUZAI、SHOUBEIZHANGDUKEXUAN，KEWEIKEHUTIGONGJIEKOUJIMODUANDINGZHIFUWU。SHIDAFUZAIZHENKONGJIXIESHOUDEYOUYUEZHIXUAN。
Introduction
新萄京DAFUZAIZHENKONGJIXIESHOU， LEDXINPIANZHIZAOLINGYUDEZHENKONGJIXIESHOUCHANPIN，ZHUYAOYONGYULEDXINPIANZHIZAOGUOCHENGZHONG，SHIXIANZHUANGYOUDALIANGLEDJINGYUANDETUOPANZAIGEGEGONGYIQIANGSHIJIANDECHUANSONG，JUYOUZHENKONGDUGAO，FUZAIDA，CHUANSHUXIAOLVGAO，NAIGAOWENDENGTEDIAN，DADATIGAOLELEDXINPIANSHENGCHANZHIZAODELIANGLVHEXIAOLV，SHILEDXINPIANZHIZAOZHUANGBEIDEGUANJIANCHANPIN。CHUANTONGDELEDXINPIANZHIZAOCAIYONGJICHENGDIANLUZHIZAOZHICHENGYINGYONGDEZHENKONGJIXIESHOU，QIFUZAINENGLIZHIYOU1kg。BENCHANPINZAIJICHENGDIANLUZHIZAOYONGZHENKONGJIXIESHOUDEJICHUSHANG，ZHENDUIQIDAFUZAIXUQIU，CHUANGXINLEQICHUANSHUJIEGOUHEKONGZHIGUILV，SHIQINENGGOUDADAO20.5kgDEFUZAINENGLI，TONGSHIBAOCHIHENXIAODEZHANYONGTIJI，BAOCHIGAONAIZHENKONGDUJIJIEJINGDENGJI。
Parameter
| 结构形式Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 驱动方式Driving method | 伺服电机Servo Motor | |
| 手数量Number of Arm | 单臂Single Arm | |
| 负载Payload | 名称name | 托盘Tray |
| 直径diameter | Φ710mm | |
| 重量weight | ≤10.5kg | |
| 自由度数DOF | 3 | |
| 手臂长度Arm Length | 355mm | |
SHOUZHIZHANGDU（ANZHUANGZHONGXINZHIGUIPIANZHONGXIN） Finger length(distance from install center to wafer center) | 765mm | |
YUNDONGFANWEI Moving Range | Z轴Z-axis | 150mm |
| R轴，机械手旋转中心至工艺腔中心 R-axis, robot center to process chamber center | 极限(Ultimate)1440mm | |
| θ轴θ-axis | 无限回转Infinite Rotation | |
QUANXINGCHENGZUIXIAOSHIJIAN Minimum running time | Z轴Z-axis | 1s/35mm |
| R轴R-axis | 5s/伸出或缩回Extend or Retraction | |
| θ轴θ-axis | 5s/180° | |
ZHONGFUDINGWEIJINGDU Repeatability | θ轴（°）θ-Axis | ±0.01（3σ） |
| R轴（mm）R-Axis | ±0.1（3σ） | |
JIXIESHOUDAIφ710mmFUZAIHOUZUIXIAOHUIZHUANZHIJING Robot minimum turning diameter with Φ 710 mm load | 1530mm | |
SHENCHU1440mmFUZAIZHIJING710mmZUIQIANDUANXIACHUILIANG The front sag of robot which out of 1440mm with Φ 710 mm load | 5.5mm | |
| 重复定位精度Repeatability | ±0.2mm | |
| 耐真空度Base Pressure (Pa) | 10-6Pa | |
| 重量Weight | 机械手本体Main-body | 100kg |
| 控制器Controller | 15kg | |
| 碰撞保护Collision Protect Function | 盘片和机械手无损伤/工位需重新校准 | |
