关键字导读： ETCH PVD PECVD MOCVD MEMS
MIAOSHU：CILIUTIMIFENG、WANGLUOHUAKONGZHIQI、MCBFDAYU1000WANCI，SEMIRENZHENGS2，F47，YINGHEGEXINGHUASHEJIJUYOUSHOUBEIZHANGDU、ZIYOUDUKEXUAN，SHOUZHIJIJIEKOUYONGHUKEDINGZHIDETEZHENG，NAIGAOWEN、NAIFUSHI，DONGTAIJIUPIANHEPENGZHUANGBAOHUGONGNENG。
新萄京Introduction
CAIYONGXIANJINDEZHIQUDIANJIQUDONGJISHU，JUYOUZAOYINXIAO、ZHENDONGXIAO、YUNXINGPINGWEN、JINGDUGAODENGTEDIAN。JUYOUGENGLINGMINDEPENGZHUANGBAOHUGONGNENG，YOUXIAOBAOHUJIXIESHOUHEKEHUJINGYUAN。QUANXINDEGUIJIGUIHUA，TIGAOYUNDONGJIEPAI，TIGAOLEYONGHUCHANNENG。ANQUANQUBAOHUDENGGONGNENGYOUXIAODITIGAOLECHANPINDEANQUANDENGJI。ZAIBANDAOTIQIANDAOGAODUANSHEBEIZHONGGUANGFANYINGYONG，DUISHEBEIKEKAOXINGYAOQIUGAO。LINGHUODEBENDIHUA、KEDINGZHIHUAFUWU，KUAISUXIANGYINGDESHOUHOUFUWU，YIJIDUNSHIDEJISHUSHILI，SHIXINTAOJINGDEZHUYAOJINGZHENGLI。TUIDONGLEGUONEIBANDAOTICHANYELIANDEJINBU，YOUXIAODEZHICHENGLEGUONEISHEBEISHANGDEFAZHAN。
Parameter
| 结构形式Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 密封方式Seal way | 磁流体密封Ferro-Fluidic Sealing | |
| 自由度数DOF | 2 | |
| 负载Payload | 名称name | 托盘Tray |
| 直径diameter | Φ370mm | |
| 重量weight | 2.5kg | |
ZUIDAYUNDONGFANWEI Moving Range | R轴（mm）R-Axis | 新萄京LIZHUZHONGXINZHIRZHOUZUIDASHENZHANCHUBEIBANYUNWUTIZHONGXINJULI820 Distance from pillar center to the moving objects center of the biggest R-axis stretching is R820mm |
| θ轴（°）θ-Axis | ||
QUANXINGCHENGZUIXIAOSHIJIAN Minimum running time | R轴（s）R-Axis | 2.5 |
| θ轴（s）θ-Axis | 3.5 | |
ZHONGFUDINGWEIJINGDU Repeatability | θ轴（°）θ-Axis | ±0.01（3σ） |
| R轴（mm）R-Axis | ±0.1（3σ） | |
| 重量Weight | 机械手本体Main-body | 41kg |
| 控制器Controller | 15kg | |
| 耐真空度Base Pressure (Pa) | 10-5Pa | |
| 漏率leak rate | <1*10E-8Mbar*L/s | |
| 碰撞保护Collision Protect Function | 盘片和机械手无损伤Disc and robot without damage | |
